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  1. 3D Research
  2. 3D Research : Volume 1
  3. 3D Research : Volume 1, Issue 2, June 2010
  4. 3D CFD for chemical transport profiles in a rotating disk CVD reactor
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3D Research : Volume 8
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3D Research : Volume 2
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3D Research : Volume 1, Issue 3, September 2010
3D Research : Volume 1, Issue 2, June 2010
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3D CFD for chemical transport profiles in a rotating disk CVD reactor
Holographic display of synthetic 3D dynamic scene
From the editor-in-chief
3D Research : Volume 1, Issue 1, March 2010

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Article

3D CFD for chemical transport profiles in a rotating disk CVD reactor

Content Provider SpringerLink
Author Han, Jong Hyun Yoon, Do Young
Copyright Year 2010
Abstract The RDCVD (Rotating Disk Chemical Vapor Deposition) technique is an appropriate method for uniform deposition of grains, such as compound semiconductior materials. The substrate temperature and rotation speed are the major factors, which determine the thickness uniformity of the deposited films. This paper investigates 3D CFD (3 Dimensional Computational Fluid Dynamics) simulation results of flow and heat transfer in a reactor of RDCVD using Fluent. In order to establish the reducibility of buoyancy effect on deposition quality, the chemical transport profile upon the disk heated is examined successfully in 3D domain for different rotating speeds. The resulting vortex flows due the simultaneous buoyance and centrifuge are discussed qualitatively in the 3D virtual system of a RDCVD reactor. 3D CFD is even more effective to describe the internal vortex flows due to the competitive inlet, buoyancy and centrifuge flows, which cannot be realized in the general 2D (2 Dimensional) CFD.
Starting Page 26
Ending Page 30
Page Count 5
File Format PDF
Journal 3D Research
Volume Number 1
Issue Number 2
e-ISSN 20926731
Language English
Publisher 3D Display Research Center
Publisher Date 2011-08-12
Publisher Place Heidelberg
Access Restriction Subscribed
Subject Keyword RDCVD 3D CFD buoyancy flow centrifuge flow Fluent Computer Imaging, Vision, Pattern Recognition and Graphics Optics, Optoelectronics, Plasmonics and Optical Devices Signal, Image and Speech Processing
Content Type Text
Resource Type Article
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