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  1. Journal of Mechanical Science and Technology
  2. Journal of Mechanical Science and Technology : Volume 25
  3. Journal of Mechanical Science and Technology : Volume 25, Issue 7, July 2011
  4. Decomposition of PFC gas using a water jet plasma
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Journal of Mechanical Science and Technology : Volume 31
Journal of Mechanical Science and Technology : Volume 30
Journal of Mechanical Science and Technology : Volume 29
Journal of Mechanical Science and Technology : Volume 28
Journal of Mechanical Science and Technology : Volume 27
Journal of Mechanical Science and Technology : Volume 26
Journal of Mechanical Science and Technology : Volume 25
Journal of Mechanical Science and Technology : Volume 25, Issue 12, December 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 1, Supplement,December 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 11, November 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 10, October 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 9, September 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 8, August 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 7, July 2011
Thermomechanical material parameters characterization of the superalloy PN 3601669-7 under low-velocity impacts
Nonlinear dynamic response of a simply supported rectangular functionally graded material plate under the time-dependent thermalmechanical loads
Sensitivity analysis and kinematic calibration of 3-UCR symmetrical parallel robot leg
Parametric study of lateral stability for a railway vehicle
Influences of stochastic perturbation of parameters on dynamic behavior of gear system
Impact noise radiated by collision of two spheres: Comparison between numerical simulations, experiments and analytical results
Stick-slip algorithm in a tangential contact force model for multi-body system dynamics
Relationship between subjective and objective evaluations of steering wheel vibration
Vibration control of the axisymmetric spherical pendulum by dynamic vibration absorber moving in radial direction
Analytical moment expression for linear element in diagonal form fast multipole boundary element method
Reliability prediction of engineering systems with competing failure modes due to component degradation
Effect of welding heat input on fatigue life of quenched boron steel and FB steel lap joint
Development of lumped-parameter mathematical models for a vehicle localized impact
Numerical simulation of fluid-structure interaction in a stirred vessel equipped with an anchor impeller
Effect of nozzle geometry for swirl type twin-fluid water mist nozzle on the spray characteristic
Wind pressure distribution on canopies attached to tall buildings
3-D finite element analysis for thermo-mechanical behavior of laminated carbon-phenolic composite ring
Effects of flank deviation on load distributions for helical gear
Bending actuation in a single-layer carbon-nanofiber/polypyrrole composite film and its fabrication
A study on the development of photoelastic experimental hybrid method for colour isochromatics (II)
FEM based simulation of the pulsed laser ablation process in nanosecond fields
Intersegmental dynamics of the lower limb in vertical jumps
The unified equations to obtain the exact solutions of piezoelectric plane beam subjected to arbitrary loads
Hydrodynamic plane and axisymmetric slip stagnation-point flow with thermal radiation and temperature jump
Decomposition of PFC gas using a water jet plasma
Numerical simulations of the combustor for waste insulating oil containing polychlorinated biphenyls
Influence of thermal management and integration with turbomachinery on the performance of polymer electrolyte membrane fuel cell systems
A simulation for prediction of nitrogen oxide emissions in lean premixed combustor
Journal of Mechanical Science and Technology : Volume 25, Issue 6, June 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 5, May 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 4, April 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 3, March 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 2, February 2011
Journal of Mechanical Science and Technology : Volume 25, Issue 1, January 2011
Journal of Mechanical Science and Technology : Volume 24
Journal of Mechanical Science and Technology : Volume 23
Journal of Mechanical Science and Technology : Volume 22
Journal of Mechanical Science and Technology : Volume 21
Journal of Mechanical Science and Technology : Volume 20
Journal of Mechanical Science and Technology : Volume 19
Journal of Mechanical Science and Technology : Volume 18
Journal of Mechanical Science and Technology : Volume 17
Journal of Mechanical Science and Technology : Volume 16
Journal of Mechanical Science and Technology : Volume 15
Journal of Mechanical Science and Technology : Volume 14
Journal of Mechanical Science and Technology : Volume 13
Journal of Mechanical Science and Technology : Volume 12
Journal of Mechanical Science and Technology : Volume 11

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Decomposition of PFC gas using a water jet plasma

Content Provider SpringerLink
Author Lim, Mun Sup Kim, Seong Cheon Chun, Young Nam
Copyright Year 2011
Abstract Perfluorocarbons (PFCs) have been adopted for plasma etching and chemical vapor deposition process in semiconductor manufacturing. Among the other exhaust gases, PFCs have longer residual time in air and higher global warming potential. To remove PFCs, water jet gliding arc plasma was designed and prepared. Water jet gliding arc plasma has received the attention as a PFCs decomposition technique due to the formation of OH radical and wide range of plasma.Using water jet gliding arc plasma, the efficacy on the decomposition of CF$_{4}$, one of the major PFCs, was evaluated. As the results of experiments, the amount of water jet increases the decomposition efficiency of CF$_{4}$. From the experimental results, a combination of plasma and water jet is considered to be effective for the decomposition of CF$_{4}$. Regarding the parametric researches, input feed of water jet, input concentration change, variation in input power, electrode gap, and electrode length were selected for experiments. The highest decomposition efficiency of CF$_{4}$ was achieved with 2.1% of input concentration, 7200 kJ/m$^{3}$ of specific energy input (SEI), 1.53×10$^{−4}$ m$^{3}$/s of total gas amount, and 4.25×10$^{−7}$ m$^{3}$/s of water jet feed.
Starting Page 1845
Ending Page 1851
Page Count 7
File Format PDF
ISSN 1738494X
Journal Journal of Mechanical Science and Technology
Volume Number 25
Issue Number 7
e-ISSN 19763824
Language English
Publisher Korean Society of Mechanical Engineers
Publisher Date 2011-07-29
Publisher Place Heidelberg
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword CF$_{4}$ destruction Gliding arc discharge Water jet scrubber Greenhouse gas Industrial and Production Engineering Vibration, Dynamical Systems, Control Mechanical Engineering
Content Type Text
Resource Type Article
Subject Mechanics of Materials Mechanical Engineering
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