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  1. Journal of Mechanical Science and Technology
  2. Journal of Mechanical Science and Technology : Volume 19
  3. Journal of Mechanical Science and Technology : Volume 19, Issue 11, November 2005
  4. Design and control of flexure based XYϑ$_{Z}$ stage
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Journal of Mechanical Science and Technology : Volume 31
Journal of Mechanical Science and Technology : Volume 30
Journal of Mechanical Science and Technology : Volume 29
Journal of Mechanical Science and Technology : Volume 28
Journal of Mechanical Science and Technology : Volume 27
Journal of Mechanical Science and Technology : Volume 26
Journal of Mechanical Science and Technology : Volume 25
Journal of Mechanical Science and Technology : Volume 24
Journal of Mechanical Science and Technology : Volume 23
Journal of Mechanical Science and Technology : Volume 22
Journal of Mechanical Science and Technology : Volume 21
Journal of Mechanical Science and Technology : Volume 20
Journal of Mechanical Science and Technology : Volume 19
Journal of Mechanical Science and Technology : Volume 19, Issue 12, December 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 11, November 2005
The subsurface stress field caused by both normal loading and tangential loading
Discretization of nonlinear systems with delayed multi-input via Taylor series and scaling and squaring technique
Structural integrity evaluation for interference-fit flywheels in reactor coolant pumps of nuclear power plants
Development of a lane departure monitoring and control system
Parallel process system and its application to steam generator structural analysis
A simple mixed-based approach for thin-walled composite blades with two-cell sections
An analytical study on prediction of effective properties in porous and non-porous piezoelectric composites
On implementation of the finite difference lattice boltzmann method with internal degree of freedom to edgetone
Determination of diesel sprays characteristics in real engine in-cylinder air density and pressure conditions
Hall effect on unsteady couette flow with heat transfer under exponential decaying pressure gradient
Characteristics of wave exciting forces on a very large floating structure with submerged-plate
The effect of oxygen and carbon dioxide concentration on soot formation in nonpremixed flames using time resolved LII technique
Effect of boundary condition history on the symmetry breaking bifurcation of wall-driven cavity flows
Synthesis of CuInGaSe$_{2}$ nanoparticles by low temperature colloidal route
Improvement of rounding effect in chemical mechanical polishing process for nano-scale manufacturing
A study on the fabrication of micro groove on SI wafer using chemical mechanical machining
Contour offset algorithm (COA) in nano replication printing (nRP) for fabricating nano-precision features
A study on the effect of pattern pitch on deformation behaviors for surface patterning by using nano-indenter
Electrochemical DNA biosensor with nanometer scale using nano-patterning lithography machine
Ionization gauge by carbon nanotube field emission
Guided cell growth through surface treatments
Electrical conduction of thiol modified 60bp Poly(dG)-poly DNA molecules through Au nanoparticles
Near-field optical patterning on chloromethylated polyimide
Nano structured surface modification of tool steel and its beneficial effects in mechanical properties
Design and control of flexure based XYϑ$_{Z}$ stage
Optimal calibration for rotating analyzer ellipsometer
A switchable cantilver for a chemically sensitive scanning force microscope
Journal of Mechanical Science and Technology : Volume 19, Issue 10, October 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 9, September 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 8, August 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 7, July 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 6, June 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 5, May 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 4, April 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 3, March 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 2, February 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 1, Supplement,January 2005
Journal of Mechanical Science and Technology : Volume 19, Issue 1, January 2005
Journal of Mechanical Science and Technology : Volume 18
Journal of Mechanical Science and Technology : Volume 17
Journal of Mechanical Science and Technology : Volume 16
Journal of Mechanical Science and Technology : Volume 15
Journal of Mechanical Science and Technology : Volume 14
Journal of Mechanical Science and Technology : Volume 13
Journal of Mechanical Science and Technology : Volume 12
Journal of Mechanical Science and Technology : Volume 11

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Design and control of flexure based XYϑ$_{Z}$ stage

Content Provider SpringerLink
Author Kang, Dongwoo Kim, Kihyun Choi, Youngman Gweon, Daegab Lee, Sukwon Lee, Moongoo
Copyright Year 2005
Abstract This article presents the design and control of an ultraprecision XYϑ$_{Z}$ stage with nanometer accuracy. The stage has a plane mechanism and symmetric hexagonal structure which consists of a monolithic flexure hinge mechanism with three piezoelectric actuators and six flexures preserving the plane motion. The symmetric design reduces the effect of temperature gradient on the structure. Because the relationship between design variables and system parameters are quite complicated and there are some trade-offs among them, it is very difficult to set design variables manually and optimal design procedure is used. The objective of design is maximizing the 1$^{st}$ resonant frequency to improve the dynamic characteristics. The reason is that the stage must move with heavy load of about 20 kg. The higher resonant frequency also makes the stage stiffer and stronger against the dynamic force and moment. This paper describes the procedures of selecting parameters for the optimal design and a mathematical formulation for the optimization problem. The stage was designed to attain ±10 um in the X- and Y-direction and ±90arcsec in the yaw direction at the same time and have the 1$^{st}$ resonant frequencies of 455.5 Hz in X- and Y-direction and 275.3 Hz for yaw direction without load. The stage was fabricated according to the optimal design results and experimental results indicate that the design procedure is effective. A conventional PI control results are presented for ultraprecision motion.
Starting Page 2157
Ending Page 2164
Page Count 8
File Format PDF
ISSN 1738494X
Journal Journal of Mechanical Science and Technology
Volume Number 19
Issue Number 11
e-ISSN 19763824
Language English
Publisher Korean Society of Mechanical Engineers
Publisher Date 2005-01-01
Publisher Place Seoul
Access Restriction One Nation One Subscription (ONOS)
Subject Keyword Precision Stage Flexure Piezoelectric Actuator Nanotechnology Optimal Design Mechanical Engineering Vibration, Dynamical Systems, Control Industrial and Production Engineering
Content Type Text
Resource Type Article
Subject Mechanics of Materials Mechanical Engineering
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